Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
نویسندگان
چکیده
The first three-axis micro-force sensor with adjustable force range from ±20 μN to ±200 μN and sub-micro-Newton measurement uncertainty is presented. The sensor design, the readout electronics, the sensor characterization and an uncertainty analysis for the force predictions are described. A novel microfabrication process based on a double silicon-on-insulator (SOI) substrate has been developed enabling a major reduction in the fabrication complexity of multi-axis sensors and actuators. (Some figures in this article are in colour only in the electronic version)
منابع مشابه
Design, Modeling, and Micromanipulation Experiments of a Novel 2-d Micro Force Sensor
Because of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above pr...
متن کاملSensing System for Micro - and Micro - assembly
Absfract Despite the enormous research efforts in creating new applications with MEMS, the research efforts at the backend such as packaging and assembly are relatively limited. One reason for this is the level of dimculty involved. One fundamental challenge lies in the fact that at micro-scale, micro mechanical structures are fragile and easy to break they typically will break at the micro-New...
متن کاملForce Feedback Pushing Scheme for Micromanipulation Applications
Pushing micro-objects using point contact provides more flexibility and less complexity compared to pick and place operation. Due to the fact that in micro-world surface forces are much more dominant than inertial forces and these forces are distributed unevenly, pushing through the center of mass of the micro-object may not yield a pure translational motion. In order to translate a micro-objec...
متن کاملA Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements
An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sensor and a temperature sensor. The integrated multifunction micro-sensor is fabricated on silicon ...
متن کاملApplication of Thau Observer for Fault Detection of Micro Parallel Plate Capacitor Subjected to Nonlinear Electrostatic Force
This paper investigates the fault detection of a micro parallel plate capacitor subjected to nonlinear electrostatic force. For this end Thau observer, which has good ability in fault detection of nonlinear system has been presented and governing nonlinear dynamic equation of the capacitor has been presented. Upper and lower threshold for fault detection have been obtained. The robustness of th...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2009